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2007
Carl Zeiss SMT AG receives the Innovation Award of German Industry for its immersion optics that enable latest-generation microchip fabrication. In addition, Carl Zeiss is honored with the “Decade Award” as the finalist with the largest number of submitted innovations over the past ten years.
Wall Street Journal Technology Innovations Award for the Orion helium-ion microscope from Carl Zeiss SMT.
Carl Zeiss received R&D 100 Award for LIBRA® 200 MC electron microscope.
For the third consecutive time, a team from Carl Zeiss was nominated for the German Future Prize – the Prize awarded for technology and innovation by the German Federal President.
Carl Zeiss presents the ORION™ helium-ion microscope. Instead of electrons, specimens are scanned with helium ions, resulting in clearly higher resolution and better material contrast.
2006
A team from Carl Zeiss is nominated for the German President‘s Future Award for the laser microdissection and pressure catapulting technology.
Carl Zeiss receives its fifth consecutive “R&D 100 Award” for the innovative LSM 5 DUO microscope system that enables fast, detailed observation of dynamic processes in living cells.
METROTOM® is the first computer tomograph developed for industrial applications that meets the exacting precision requirements of metrology in the micrometer range.
2005
New digital planetarium projectors from Carl Zeiss illuminate domes up to 30 meters in diameter with outstanding brilliance.
The Starlith® 1700i lithography lens for microchip fabrication is the first system of its kind to combine lens and mirror systems.
Sub-atomic resolution is achieved for the first time using the UHRTEM electron beam microscope.
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